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Kazunari Shinya

USPTO Granted Patents = 7

EPO Patents = 1

Average Co-Inventor Count = 2.2

ph-index = 3

Forward Citations = 56(Granted Patents)

Location History:

Takatsuki, JP (1995)
Osaka-fu, JP (2006)
Osaka, JP (2007 - 2013)

Company Filing History:

Shimadzu Corporation

Ebara Corporation

where one patent can have more than one assignee

Years Active: 1995-2013

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8342907 - Polishing state monitoring method (2013-01-01),

2. 7645181 - Polishing state monitoring apparatus and polishing apparatus (2010-01-12),

3. 7438627 - Polishing state monitoring method (2008-10-21),

4. 7252575 - Polishing state monitoring apparatus and polishing apparatus and method (2007-08-07),

5. 7012699 - Method of and apparatus for measuring thickness of thin film or thin layer (2006-03-14),

6. 7002693 - Thickness measurement method and apparatus (2006-02-21),

7. 5442574 - Method and apparatus for determining a base line of a measurement (1995-08-15),

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