The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Aug. 07, 2007
Filed:
Oct. 15, 2003
Yoichi Kobayashi, Tokyo, JP;
Shunsuke Nakai, Tokyo, JP;
Hitoshi Tsuji, Tokyo, JP;
Yasuo Tsukuda, Osaka, JP;
Junki Ishimoto, Shiga, JP;
Kazunari Shinya, Osaka, JP;
Yoichi Kobayashi, Tokyo, JP;
Shunsuke Nakai, Tokyo, JP;
Hitoshi Tsuji, Tokyo, JP;
Yasuo Tsukuda, Osaka, JP;
Junki Ishimoto, Shiga, JP;
Kazunari Shinya, Osaka, JP;
EBARA Corporation, Tokyo, JP;
Shimadzu Corporation, Kyoto, JP;
Abstract
A polishing state monitoring apparatus measures characteristic values of a surface, being polished, of a workpiece to determine the timing of a polishing end point. The polishing state monitoring apparatus includes a light-emitting unit for applying light from a light source to a surface of a workpiece being polished, a light-receiving unit for receiving reflected light from the surface of the workpiece, a spectroscope unit for dividing the reflected light received by the light-receiving unit into a plurality of light rays having respective wavelengths, and light-receiving elements for accumulating the detected light rays as electrical information. The polishing state monitoring apparatus further includes a spectral data generator for reading the electrical information accumulated by the light-receiving elements and generating spectral data of the reflected light, and a processor for calculating a predetermined characteristic value on the surface of the workpiece based on the spectral data generated by the spectral data generator.