This inventor holds 1 USPTO granted patent and 1 published patent application. Top assignee: Tokyo Electron Limited. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Kazuma Kita and Substrate-Processing Innovation.
Introduction
Kazuma Kita is an inventor associated with Miyagi, Japan, and Tokyo Electron Limited. His patent work concerns substrate-processing equipment used in semiconductor manufacturing.
Latest Patents
Kita is credited with 1 patent. His patent, “Substrate-processing apparatus,” describes an electrostatic chuck with a support surface designed to hold an annular member. A diffusion groove in the support surface distributes heat-transfer gas into the gap between the annular member and the surface. The groove includes a concentric annular channel connected to a radial channel extending outward from it.
Career Highlights
Kita’s listed invention addresses gas distribution at the interface between an annular member and an electrostatic chuck, a feature of substrate-processing apparatus design. The available information identifies Tokyo Electron Limited as his company.
Collaborations
Riichiro Endo and Takehiro Tanikawa are identified as Kita’s coworkers. The provided information does not specify their roles in the patent.
Conclusion
Kazuma Kita’s patent reflects a focused contribution to substrate-processing technology through an electrostatic chuck design that distributes heat-transfer gas beneath an annular member.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile