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Nirasaki, Japan

Kazuichi Hayashi

USPTO Granted Patents = 10 (Patent Applications = 1)

Average Co-Inventor Count = 2.0

ph-index = 7

Forward Citations = 622(Granted Patents)

Location History:

Yamanashi-ken, JP (1999 - 2001)
Kofu, JP (1999 - 2002)
Nirasaki, JP (2011 - 2012)

Company Filing History:

10 out of 10,341

Tokyo Electron Limited

Years Active: 1999-2012

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10 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 8310054 - Semiconductor device manufacturing method and target substrate processing system (2012-11-13),

2. 8038835 - Processing device, electrode, electrode plate, and processing method (2011-10-18),

3. 8003535 - Semiconductor device manufacturing method and target substrate processing system (2011-08-23),

4. 6368450 - Processing apparatus (2002-04-09),

5. 6253029 - Vacuum processing apparatus (2001-06-26),

6. 6156107 - Trap apparatus (2000-12-05),

7. 6149729 - Film forming apparatus and method (2000-11-21),

8. 5942282 - Method for depositing a titanium film (1999-08-24),

9. 5904757 - Trap apparatus (1999-05-18),

10. 5879139 - Vacuum pump with gas heating (1999-03-09),

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