Location History:
- Atsugi, JP (1990 - 1994)
- Kanagawa, JP (1997 - 2003)
Company Filing History:
Years Active: 1990-2003
Title: Kazuhisa Nakashita: Innovator in Laser Processing Technology
Introduction
Kazuhisa Nakashita is a prominent inventor based in Atsugi, Japan. He has made significant contributions to the field of laser processing technology, holding a total of 9 patents. His work focuses on enhancing the efficiency and effectiveness of laser applications in semiconductor manufacturing.
Latest Patents
One of Nakashita's latest patents is a laser processing apparatus and process designed for laser annealing silicon films that are 2 micrometers or less in thickness. This innovative process involves irradiating a laser beam with a wavelength of 400 nanometers or less, operating in pulsed mode with a pulse width of 50 nanoseconds or more, and preferably 100 nanoseconds or more. The apparatus includes a laser generation device and a stage for mounting samples separately from the device, which helps prevent the transfer of vibrations from the stage to the laser generation device and optical system. This design allows for a stable laser beam, ultimately improving productivity in semiconductor processing.
Career Highlights
Kazuhisa Nakashita has been instrumental in advancing laser processing techniques within the semiconductor industry. His work at Semiconductor Energy Laboratory Co., Ltd. has positioned him as a key figure in the development of innovative laser technologies. His patents reflect a deep understanding of the complexities involved in laser applications and their impact on manufacturing processes.
Collaborations
Throughout his career, Nakashita has collaborated with notable colleagues, including Shinji Imatou and Shunpei Yamazaki. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas in the field of laser technology.
Conclusion
Kazuhisa Nakashita's contributions to laser processing technology have significantly impacted the semiconductor industry. His innovative patents and collaborative efforts continue to drive advancements in this critical field.