Kazuhiro Zama

USPTO Granted Patents = 15 (Patent Applications = 2)

Average Co-Inventor Count = 3.1

ph-index = 2

Forward Citations = 22(Granted Patents)

Location History:

Mito, JP (2008 - 2014)
Nagoya, JP (2012 - 2021)

Company Filing History:

13 out of 2,874

Hitachi-high-technologies Corporation

patents

2 out of 36,546

Toyota Jidosha Kabushiki Kaisha

patents

Years Active: 2008-2021

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15 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 11159718 - Imaging method (2021-10-26),

2. 10674073 - Imaging method (2020-06-02),

3. 8686383 - Object holding apparatus, and inspection apparatus (2014-04-01),

4. 8537351 - Inspection apparatus and inspection method (2013-09-17),

5. 8472016 - Optical defect inspection apparatus (2013-06-25),

6. 8310667 - Wafer surface inspection apparatus and wafer surface inspection method (2012-11-13),

7. 8203705 - Inspection apparatus and inspection method (2012-06-19),

8. 8184283 - Optical defect inspection apparatus (2012-05-22),

9. 8183549 - Substrate holding apparatus, and inspection or processing apparatus (2012-05-22),

10. 7999242 - Substrate holding apparatus, and inspection or processing apparatus (2011-08-16),

11. 7925390 - Mini environment apparatus, inspection apparatus, manufacturing apparatus and cleaning method of space (2011-04-12),

12. 7894052 - Optical defect inspection apparatus (2011-02-22),

13. 7746461 - Optical defect inspection apparatus (2010-06-29),

14. 7723709 - Substrate holding apparatus, and inspection or processing apparatus (2010-05-25),

15. 7420668 - Wafer surface inspection apparatus and wafer surface inspection method (2008-09-02),

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