Location History:
- Shizuoka-ken, JP (2004 - 2005)
- Numazu, JP (2003 - 2006)
- Shizuoka, JP (2005 - 2014)
Company Filing History:
Years Active: 2003-2014
Title: Innovator Kazuhiro Shiba: A Visionary in Charged Particle Beam Technology
Introduction: Kazuhiro Shiba, based in Shizuoka-ken, Japan, is a prominent inventor known for his significant contributions to the field of charged particle beam technology. With a remarkable portfolio of 10 patents, Shiba has pioneered innovative solutions that enhance the capabilities of modern photolithography and writing apparatus.
Latest Patents: Among his latest innovations, Shiba has developed a charged particle beam writing apparatus and a corresponding method. This apparatus features a substrate cover attachment/detachment unit designed to streamline the writing process on substrates. The writing unit employs a charged particle beam to accurately inscribe patterns while a position measurement unit ensures precise alignment by correcting positional deviations before and after the writing process. Additionally, Shiba has introduced a method for detecting substrate positions in charged particle beam photolithography, utilizing a laser beam to illuminate the substrate and accurately calculate its position on a moveable stage.
Career Highlights: Throughout his career, Kazuhiro Shiba has held significant roles in esteemed companies, including Toshiba Kikai and Nuflare Technology, Inc. His expertise in engineering and innovation has made a substantial impact in the development of advanced manufacturing technologies.
Collaborations: Shiba has worked closely with several notable colleagues, including Minoru Hamamura and Takao Date. Their combined efforts have propelled advancements in the industry, contributing to the larger field of photolithography and charged particle beam applications.
Conclusion: Kazuhiro Shiba's innovative work in charged particle beam technology continues to shape the future of precision manufacturing and photolithography. His continued commitment to excellence and collaboration with other experts in the field underline his pivotal role as an inventor and leader in technological advancements.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.