Kazuhiro Kobushi

Title: Kazuhiro Kobushi: Innovator in Semiconductor Technology

Introduction

Kazuhiro Kobushi is a prominent inventor based in Osaka, Japan. He has made significant contributions to the field of semiconductor technology, holding a total of 4 patents. His work focuses on improving the efficiency and accuracy of semiconductor devices.

Latest Patents

One of Kobushi's latest patents is an "Apparatus for Optically Forming Pattern." This innovative apparatus utilizes a reticle with an original pattern that is optically projected onto an object. It features a storage circuit that retains information about the exposure conditions for the reticle. The exposure apparatus reads this information to project the original pattern accurately, ensuring that the pattern formed on the object corresponds precisely to the original. This design allows for automatic and accurate setting of exposure conditions in the exposure apparatus.

Another notable patent is the "Method for Fabricating a Polycrystalline Silicon Resistor." This method enhances the diameter of crystal grains in a polycrystalline conductor through a heat treatment process. By making the lower surface of the polycrystalline conductor amorphous using ion-implanting atoms, the uniformity of crystal grain size is improved. This method also enhances the uniformity of impurity concentration distribution, leading to better performance of resistors or conductors formed from the polycrystalline material.

Career Highlights

Kazuhiro Kobushi is currently employed at Matsushita Electric Industrial Co., Ltd., where he continues to innovate in semiconductor technology. His work has had a lasting impact on the industry, contributing to advancements in device fabrication and performance.

Collaborations

Kobushi has collaborated with notable colleagues such as Shuichi Kameyama and Tadao Komeda. Their combined expertise has fostered a productive environment for innovation and development in their field.

Conclusion

Kazuhiro Kobushi's contributions to semiconductor technology through his patents and work at Matsushita Electric Industrial Co., Ltd. highlight his role as a key innovator in the industry. His inventions continue to influence the development of advanced semiconductor devices.