Kazuhiko Ito

Kazuhiko Ito, a resident of Kumamoto-ken, JP, is an accomplished inventor with a total of 8 patents to his name. His recent inventions in the field of substrate processing apparatus demonstrate his expertise in aligning substrates with precision and speed.

The first patent, titled "Substrate processing apparatus and method for adjusting a substrate transfer position," focuses on the alignment of a substrate by monitoring a mark on its surface. This allows for the determination and adjustment of misalignment between the center of the substrate and the rotation center of a substrate support member, ensuring optimal alignment.

In his second patent, "Substrate processing apparatus and method of aligning substrate carrier apparatus," Kazuhiko Ito presents a solution for precise positioning of a substrate carrier apparatus when entering a processing unit. This is achieved by utilizing optical detection marks and an optical sensor to accurately rotate and move the substrate carrier apparatus, ensuring the acquisition of a precise transfer position when placing the substrate on a mounting table in the processing unit.

Kazuhiko Ito is an esteemed inventor currently working at Tokyo Electron Limited, a renowned company in the field of electronic components and semiconductor manufacturing equipment.

During his tenure at the company, Kazuhiko Ito has collaborated with notable coworkers such as Issei Ueda and Mitiaki Matsushita, showcasing his ability to work effectively within a team to drive innovation and contribute to advancements in the industry.

Please note that the company name "TOKYO ELECTRON LIMITED" is correctly represented as provided, with all capital letters.