Company Filing History:
Years Active: 1996
Title: Innovations of Katsunori Naitoh in Plasma Processing Technology.
Introduction
Katsunori Naitoh is a prominent inventor based in Yamanashi-ken, Japan. He has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of advanced systems that enhance manufacturing processes.
Latest Patents
Katsunori Naitoh holds a patent for a magnetron plasma processing system. This system features multiple processing chambers connected to a common transfer chamber. Each processing chamber is equipped with a pair of counter electrodes that generate an electric field, along with a magnet mechanism that creates a magnetic field with an N-S axis crossing the electric field. The unique aspect of this invention is that all magnetic fields are rotated in the same plane, with their rotation controlled by a dedicated controller. When one magnetic field is rotated, the others follow suit at equal speed, ensuring that their N-S axes remain parallel and identical.
Career Highlights
Katsunori Naitoh is associated with Tokyo Electron Limited, a leading company in the semiconductor manufacturing equipment industry. His work at the company has been instrumental in advancing plasma processing technologies.
Collaborations
Katsunori has collaborated with notable colleagues such as Makoto Hasegawa and Tsuyoshi Saito. Their combined expertise has contributed to the success of various projects within the company.
Conclusion
Katsunori Naitoh's innovative contributions to magnetron plasma processing systems exemplify the impact of his work in the field. His patent and collaborations highlight the importance of teamwork in driving technological advancements.