Location History:
- Kanagawa-ken, JP (1998 - 1999)
- Kanagawa, JP (2000)
- Yokohama, JP (1997 - 2001)
- Beaverton, OR (US) (2004)
- Chigasaki, JP (2001 - 2006)
Company Filing History:
Years Active: 1997-2006
Title: Achievements of Katsumi Oomori: Innovating Semiconductor Manufacturing
Introduction: Katsumi Oomori, based in Chigasaki, Japan, is a distinguished inventor with an impressive portfolio of 26 patents. His contributions primarily focus on advancements in photoresist compositions that play a crucial role in the semiconductor manufacturing process.
Latest Patents: Among his notable inventions, Oomori has disclosed a positive-working chemical-amplification photoresist composition that enhances the patterning process in semiconductor device manufacturing. This innovative composition allows for satisfactory patterning on substrates coated with challenging undercoating films, such as silicon nitride and phosphosilicate glass, which conventional photoresist compositions struggle with. The formulation not only includes a film-forming resin that increases solubility in alkaline solutions when interacting with an acid and a radiation-sensitive acid-generating compound but also incorporates a phosphorus-containing oxo acid, such as phosphoric or phosphonic acid, or an ester thereof.
Another groundbreaking patent by Oomori presents a novel positive-working chemical-amplification photoresist composition capable of creating extremely finely patterned resist layers necessary for semiconductor device fabrication. This composition comprises a specific copolymeric resin and a radiation-sensitive acid-generating agent, enhancing the precision and quality of semiconductor manufacturing.
Career Highlights: Oomori’s career is marked by his alignment with Tokyo Ohka Kogyo Co., Ltd., a leading company in the semiconductor materials industry. His dedication and innovative spirit have significantly contributed to the development of advanced photoresist technologies, positioning the company as a key player in the semiconductor field.
Collaborations: Throughout his career, Katsumi Oomori has collaborated with notable colleagues, including Kazufumi Sato and Hiroto Yukawa. These collaborations have enriched his inventions and fostered advancements in semiconductor technologies.
Conclusion: With a substantial number of patents and significant advancements in the manufacturing of semiconductor devices, Katsumi Oomori stands out as a leading innovator. His work not only benefits his company but also contributes to technological advancements in the semiconductor industry, showcasing the importance of innovation in this critical field.