Kasturi Saha

Title: Innovations by Kasturi Saha in Semiconductor Metrology

Introduction

Kasturi Saha is an accomplished inventor based in Bengaluru, India. She has made significant contributions to the field of semiconductor technology, particularly in the area of metrology. Her innovative work focuses on enhancing process control in semiconductor fabrication.

Latest Patents

Kasturi holds a patent for a method, system, and computer program product for 3D-NAND CDSEM metrology. This patent describes a method for process control of a semiconductor structure fabricated through a series of fabrication steps. The method involves obtaining an image of the semiconductor structure that indicates at least two individual fabrication steps. The image is generated by scanning the semiconductor structure with a charged particle beam and collecting signals emanating from it. A hardware processor processes the image to determine a parameter of the semiconductor structure, which includes measuring steps from among the fabrication steps as individual features. This innovation is crucial for improving the accuracy and efficiency of semiconductor manufacturing.

Career Highlights

Kasturi Saha is currently employed at Applied Materials Israel Limited, where she continues to advance her research and development efforts in semiconductor technology. Her work has positioned her as a key player in the industry, contributing to the evolution of fabrication processes.

Collaborations

Kasturi collaborates with notable colleagues, including Roman Kris and Roi Meir, who share her passion for innovation in semiconductor technology. Their teamwork fosters an environment of creativity and technical excellence.

Conclusion

Kasturi Saha's contributions to semiconductor metrology exemplify her dedication to innovation and excellence in technology. Her patent and ongoing work at Applied Materials Israel Limited highlight her role as a leading inventor in the field.