Karthikeyan Pillai

Title: Karthikeyan Pillai: Innovator in Semiconductor Technology

Introduction

Karthikeyan Pillai is a notable inventor based in Albany, NY (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approach to device fabrication.

Latest Patents

One of his latest patents is focused on fabricating three-dimensional semiconductor structures. This method involves forming a layer stack of alternating layers of a first spin-on material and a second spin-on material on a substrate. The process includes etching first openings through the layer stack and filling these openings with a third material. Additionally, it entails etching second openings, removing the first spin-on material, and replacing it with a fourth material, which is a metal-containing substance. Another significant patent by Karthikeyan is a method of protecting low-K layers. This process protects low-k dielectric layers from etch damage by using a selectively formed protection layer. This layer is formed on the low-k layer and is designed to withstand plasma etching processes, ensuring the integrity of the low-k dielectric during fabrication.

Career Highlights

Karthikeyan Pillai is currently employed at Tokyo Electron Limited, a leading company in the semiconductor manufacturing industry. His work focuses on advancing technologies that enhance the performance and reliability of semiconductor devices.

Collaborations

Throughout his career, Karthikeyan has collaborated with talented individuals such as Hirokazu Aizawa and Nicholas Joy. These collaborations have contributed to the development of innovative solutions in semiconductor technology.

Conclusion

Karthikeyan Pillai is a distinguished inventor whose work in semiconductor technology has led to valuable patents and advancements in the field. His contributions continue to influence the industry and pave the way for future innovations.