This inventor holds 3 USPTO granted patents. Top assignee: Motorola Corporation. Active years: 2001-2003.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2001-2003
Title: The Innovations of Karl Mautz
Introduction
Karl Mautz is a notable inventor based in Dresden, Germany. He has made significant contributions to the field of metrology and semiconductor manufacturing. With a total of 3 patents, Mautz's work has had a considerable impact on the industry.
Latest Patents
One of Mautz's latest patents is a "Measurement chuck having piezoelectric elements and method." This invention involves a metrology and probe chuck that holds a flat object, such as a semiconductor wafer, at the backside. The chuck is designed with a base plate that supports a plurality of pins to receive partial forces from the backside. Additionally, piezoelectric elements attached to the pins sense these forces and apply partial displacements to compensate for irregularities in the backside contour.
Another significant patent is for a "Method and system for manufacturing semiconductor devices on a wafer." This invention outlines a comprehensive system and method for producing semiconductor devices, including steps such as coating a photoresist onto the wafer, heating it to a prebake temperature, and exposing it to deep UV light. The process also includes stabilizing the photoresist before the etching process, ensuring high-quality semiconductor production.
Career Highlights
Karl Mautz is currently employed at Motorola Corporation, where he continues to innovate and develop new technologies. His work has been instrumental in advancing the capabilities of semiconductor manufacturing and metrology.
Collaborations
Mautz has collaborated with several notable individuals in his field, including John Maltabes and Alain Bernhard Charles. These collaborations have further enriched his work and contributed to the success of his inventions.
Conclusion
Karl Mautz's contributions to the fields of metrology and semiconductor manufacturing are noteworthy. His innovative patents and collaborations reflect his commitment to advancing technology. His work continues to influence the industry and inspire future innovations.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile