Karen F Scoffone

Title: The Innovative Contributions of Karen F. Scoffone

Introduction

Karen F. Scoffone is a notable inventor based in Redwood City, CA. She has made significant contributions to the field of spectroscopic ellipsometry, with a focus on developing advanced methods and systems that enhance measurement precision.

Latest Patents

Karen holds 2 patents, including her latest invention, which is a focused beam spectroscopic ellipsometry method and system. This innovative system employs reflective optics to measure a small region of a sample by reflecting radiation, preferably broadband UV, visible, and near-infrared radiation. The system features an autofocus assembly and a processor designed to determine the thickness and/or complex refractive index of a thin film on the sample. The design incorporates only reflective optics along the optical path, ensuring that the sample beam reflects at low incidence angles. The system is capable of focusing the beam to a compact spot on the sample at high incidence angles, with an incidence angle selection element for precise measurements. Additionally, some embodiments integrate both a spectrophotometer and an ellipsometer into a single instrument, sharing a radiation source for enhanced functionality.

Career Highlights

Throughout her career, Karen has worked with prominent companies such as Tencor Instruments and Kla-Tencor Technologies Corporation. Her work has significantly impacted the field of optical measurement technologies.

Collaborations

Karen has collaborated with notable colleagues, including Timothy R. Piwonka-Corle and Xing Chen, contributing to advancements in their shared field of expertise.

Conclusion

Karen F. Scoffone's innovative work in spectroscopic ellipsometry exemplifies her dedication to advancing measurement technologies. Her contributions continue to influence the industry and inspire future innovations.