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Kaoru Shinbara

This inventor holds 6 USPTO granted patents. Top assignee: Dainippon Screen Mfg. Co., Ltd.. Active years: 1988-2001.

USPTO Granted Patents = 6

% Patents Active = 100.0

Average Co-Inventor Count = 2.0

ph-index = 6

Forward Citations = 343(Granted Patents)

Location History:

Kusatsu, JP (1988)
Hikone, JP (1992 - 1994)
Shiga-ken, JP (2000)
Shiga, JP (1996 - 2001)

Company Filing History:

Dainippon Screen Mfg. Co., Ltd.

Years Active: 1988-2001

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6 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6273104 - Method of and apparatus for processing substrate (2001-08-14),

2. 6155275 - Substrate processing unit and substrate processing apparatus using the (2000-12-05),

3. 5485644 - Substrate treating apparatus (1996-01-23),

4. 5288333 - Wafer cleaning method and apparatus therefore (1994-02-22),

5. 5158100 - Wafer cleaning method and apparatus therefor (1992-10-27),

6. 4788994 - Wafer holding mechanism (1988-12-06),

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