IDiyas

For the Inventor, By the Inventor

Shiga, Japan

Kaoru Shinbara

USPTO Granted Patents = 6

Average Co-Inventor Count = 2.0

ph-index = 6

Forward Citations = 342(Granted Patents)


Location History:

  • Kusatsu, JP (1988)
  • Hikone, JP (1992 - 1994)
  • Shiga-ken, JP (2000)
  • Shiga, JP (1996 - 2001)

Company Filing History:

goldMedal6 out of 1,306 
 
Dainippon Screen Mfg. Co., Ltd.
 patents

Years Active: 1988-2001

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6 patents (USPTO):Explore Patents
1. 6273104 - Method of and apparatus for processing substrate (2001-08-14),
2. 6155275 - Substrate processing unit and substrate processing apparatus using the (2000-12-05),
3. 5485644 - Substrate treating apparatus (1996-01-23),
4. 5288333 - Wafer cleaning method and apparatus therefore (1994-02-22),
5. 5158100 - Wafer cleaning method and apparatus therefor (1992-10-27),
6. 4788994 - Wafer holding mechanism (1988-12-06),
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