The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 05, 2000
Filed:
Sep. 08, 1998
Kaoru Shinbara, Shiga-ken, JP;
Abstract
A substrate processing unit having a substrate processing section for processing a substrate held therein while supplying a process fluid to the substrate; an enclosure enclosing the substrate processing section and having an opening, formed in a side wall thereof, through which the substrate is carried in and out of the substrate processing section; a process fluid pipe through which the process fluid is supplied to the substrate held in the processing section; and a connector section for connecting the process fluid pipe to an external process fluid source. The connector section is provided on a side wall of the enclosure opposite across the substrate processing section from the side wall formed with the opening. A substrate processing apparatus is constituted by a plurality of such substrate processing units which are arranged with the openings thereof being oriented in substantially the same direction.