Company Filing History:
Years Active: 2017-2018
Title: Innovations by Kang Hua Chang
Introduction
Kang Hua Chang is a notable inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor manufacturing, particularly through his innovative patents. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of wafer processing.
Latest Patents
Kang Hua Chang's latest patents include a high-throughput system and method for post-implantation single wafer warm-up. This system comprises an implantation chamber and a warming chamber, which is located outside the implantation chamber and shares a sidewall with it. The design features a first robotic arm that moves a first wafer from the implantation chamber into the warming chamber, while a second robotic arm transfers a second wafer into the implantation chamber. Another patent details a high throughput system for warming a wafer to a desired temperature after undergoing a low-temperature implantation process. This system includes an implantation chamber, a wafer warming chamber designed to uniformly warm a single wafer, and multiple robotic arms that facilitate the transfer of wafers throughout the system. The simultaneous operation of the robotic arms with multiple wafers ensures a high throughput process, and the warming chamber may operate in a vacuum environment to eliminate mist-condensation issues that can lead to wafer spotting.
Career Highlights
Kang Hua Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work has been instrumental in advancing wafer processing technologies, contributing to the overall efficiency of semiconductor manufacturing.
Collaborations
Kang has collaborated with notable colleagues such as Tsun-Jen Chan and Cheng-Hung Hu, further enhancing the innovative capabilities within his team.
Conclusion
Kang Hua Chang's contributions to semiconductor technology through his patents demonstrate his commitment to innovation and efficiency in wafer processing. His work continues to impact the industry positively.