Location History:
- Shizuoka, JP (2011)
- Susono, JP (2011 - 2013)
Company Filing History:
Years Active: 2011-2013
Title: **Innovative Contributions of Kanako Tsumagari in Semiconductor Technology**
Introduction
Kanako Tsumagari is a distinguished inventor based in Susono, Japan, known for her significant contributions to semiconductor technology. With three patents to her name, Tsumagari is dedicated to improving the efficiency and reliability of semiconductor manufacturing processes. Her latest innovations are at the forefront of enhancing productivity in the tech industry.
Latest Patents
Tsumagari's recent patents focus on advanced methods for semiconductor device manufacturing. Her first patent details a method for manufacturing a semiconductor device, aimed at improving the reliability of the metal cap layer as well as overall productivity. The process includes several critical steps, such as:
- **Insulation Layer Step**: Superimposing an insulation layer on a semiconductor substrate containing an element region.
- **Recess Step**: Forming a recess in the insulation layer for embedding a metal layer.
- **Metal Layer Step**: Embedding a metal layer in the recess.
- **Planarization Step**: Planarizing the surfaces of both the insulation layer and the metal layer to ensure they are flush with each other.
- **Metal Cap Layer Step**: Applying a metal cap layer containing zirconium and nitrogen elements on the surfaces post-planarization.
Additionally, Tsumagari has developed a method for forming a barrier film made of ZrB film using an innovative coating apparatus equipped with plasma generation means. This apparatus features a coaxial resonant cavity that excites gas injected into a nonmetallic pipe into a plasma state, showcasing her expertise in plasma technology and materials science.
Career Highlights
Tsumagari is a valued inventor at ULVAC, Inc., where she collaborates with talented professionals in the field of semiconductor manufacturing. Her work has significantly impacted the company's ability to deliver high-quality semiconductor devices, pushing the boundaries of what is achievable in this rapidly advancing technological landscape.
Collaborations
In her endeavors at ULVAC, Inc., Tsumagari collaborates closely with notable colleagues, including Masanobu Hatanaka and Michio Ishikawa. Together, they contribute to groundbreaking research and development efforts that continue to shape the future of semiconductor technology.
Conclusion
Kanako Tsumagari's innovative contributions to semiconductor device manufacturing exemplify her commitment to enhancing technology and productivity in the industry. With her valuable patents and collaborative efforts at ULVAC, Inc., she stands as a brilliant example of the impact a dedicated inventor can have on the advancement of technological processes. Her work not only pushes the boundaries of semiconductor technology but also inspires future generations of inventors and engineers.