Kah S Seah

Title: Kah S Seah: Innovator in Semiconductor Technology

Introduction

Kah S Seah is a prominent inventor based in Singapore, known for his contributions to semiconductor technology. He has developed innovative methods that enhance the efficiency and performance of semiconductor devices. His work has significantly impacted the field, particularly in the area of electrical interconnects.

Latest Patents

Kah S Seah holds a patent for a method for making electrical local interconnects. This method involves producing an interconnect on a semiconductor device that features silicon-containing conductive surfaces and dielectric surfaces. The process includes forming separate regions of a blanket first refractory metal silicide on the silicon-containing conductive surfaces, which is composed of a first refractory metal and silicon from the surfaces. It also involves forming a blanket second refractory metal layer over the device, followed by a blanket alpha-Si layer over the second refractory metal layer. A mask is then applied to pattern an interconnect between the separate regions, after which unwanted portions of the refractory metal layers and the alpha-Si layer are etched away. The device undergoes a rapid thermal annealing process, forming a low resistance refractory metal silicide between the alpha-Si layer and the second refractory metal layer, and finally, the unwanted portions of the refractory metal layers that are not covered by the refractory metal silicide are etched away.

Career Highlights

Kah S Seah is associated with Chartered Semiconductor Manufacturing Ltd, a leading corporation in the semiconductor industry. His work at this company has allowed him to apply his innovative ideas and contribute to advancements in semiconductor manufacturing.

Collaborations

Kah S Seah has collaborated with notable colleagues, including Yeow Meng Teo and Lap Chan. These collaborations have fostered a creative environment that encourages the development of cutting-edge technologies in the semiconductor field.

Conclusion

Kah S Seah's contributions to semiconductor technology, particularly through his patented methods for electrical interconnects, highlight his role as an influential inventor in the industry. His work continues to shape the future of semiconductor manufacturing and innovation.