This inventor holds 2 USPTO granted patents. Top assignees: Lam Research Corporation, Ceradyne, Inc.. Active years: 2006-2014.
Company Filing History:
2 out of 3,940 
1 out of 35 
Years Active: 2006-2014
Title: K Y Ramanujam: Innovator in Plasma Processing Technologies
Introduction
K Y Ramanujam is a notable inventor based in Fremont, CA, who has made significant contributions to the field of plasma processing technologies. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of semiconductor manufacturing processes.
Latest Patents
Ramanujam's latest patents include innovative methods aimed at improving the performance and longevity of plasma processing components. One of his patents describes a method for increasing the mean time between cleans of a plasma etch chamber and its parts. This involves using sintered silicon nitride components that are exposed to ion bombardment and ionized halogen gas. The components are made from high purity silicon nitride and a sintering aid of silicon dioxide. Another patent addresses the reduction of metallic contamination on silicon substrates during plasma processing, utilizing a plasma processing apparatus with sintered silicon nitride components. Additionally, he has developed a method to prevent de-lamination of semiconductor wafer film stacks during a chemical mechanical planarization (CMP) process by implementing pulsed polishing head rotation.
Career Highlights
Throughout his career, K Y Ramanujam has worked with prominent companies in the semiconductor industry, including Lam Research Corporation and Ceradyne, Inc. His expertise in plasma processing has made him a valuable asset in these organizations, contributing to advancements in semiconductor manufacturing technologies.
Collaborations
Ramanujam has collaborated with several professionals in his field, including Mukund Srinivasan and Travis R Taylor. These collaborations have fostered innovation and the development of new technologies in plasma processing.
Conclusion
K Y Ramanujam's contributions to plasma processing technologies have significantly impacted the semiconductor industry. His innovative patents and career achievements highlight his role as a leading inventor in this field.