Location History:
- Sunnyvale, CA (US) (2005)
- Cupertino, CA (US) (2005)
Company Filing History:
Years Active: 2005
Title: Innovations of Junsheng Yang in Chemical Mechanical Polishing
Introduction
Junsheng Yang is a notable inventor based in Sunnyvale, CA, who has made significant contributions to the field of chemical mechanical polishing. With a total of 2 patents, his work focuses on enhancing the efficiency and effectiveness of polishing processes used in various industries.
Latest Patents
Yang's latest patents include a "Chemical mechanical polishing apparatus and method having a retaining ring with a contoured surface" and a "Slurry distributor for chemical mechanical polishing apparatus and method of using the same." The first patent addresses the reduction of non-uniformities in material removal from substrates by utilizing a polishing head with a carrier and a retaining ring designed to minimize rebound effects. The second patent introduces a polishing apparatus that features a slurry distributor aimed at improving planarization uniformity, incorporating mechanisms to rotate the platen and dispense slurry effectively.
Career Highlights
Junsheng Yang is currently employed at Multiplanar Technologies Incorporated, where he continues to innovate in the field of polishing technologies. His work has been instrumental in developing systems that enhance the quality and yield of polished substrates.
Collaborations
Yang collaborates with esteemed colleagues such as Jiro Kajiwara and Gerard Moloney, contributing to a dynamic team focused on advancing polishing technologies.
Conclusion
Junsheng Yang's contributions to chemical mechanical polishing through his innovative patents and collaborative efforts highlight his importance in the field. His work continues to influence the industry, paving the way for improved polishing techniques and technologies.