The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 03, 2005
Filed:
Sep. 03, 2002
Jiro Kajiwara, Saitama-ken, JP;
Gerard Moloney, Milpitas, CA (US);
Jun Liu, Cupertino, CA (US);
Junsheng Yang, Cupertino, CA (US);
Ernesto Saldana, San Jose, CA (US);
Cormac Walsh, Sunnyvale, CA (US);
Alejandro Reyes, San Jose, CA (US);
Jiro Kajiwara, Saitama-ken, JP;
Gerard Moloney, Milpitas, CA (US);
Jun Liu, Cupertino, CA (US);
Junsheng Yang, Cupertino, CA (US);
Ernesto Saldana, San Jose, CA (US);
Cormac Walsh, Sunnyvale, CA (US);
Alejandro Reyes, San Jose, CA (US);
Multi Planar Technologies Incorporated, San Jose, CA (US);
Abstract
A polishing apparatus () is provided for polishing a substrate () that has slurry distributor () which improves planarization uniformity. Generally, the apparatus () includes: (i) a platen () with a polishing surface (); (ii) a head () adapted to hold the substrate () against the polishing surface; (iii) a mechanism to rotate the platen () during polishing; (iv) a dispenser () having nozzles () to dispense slurry on the surface (); and (v) a distributor () between the nozzles () and the head (). In one embodiment, the apparatus () further includes a wiper () between the head () and the distributor () to remove used slurry and polishing byproducts from the surface (), thereby reducing agglomerations or deposits that can damage the substrate () and improving yield. Optionally, the apparatus () further includes a dispenser () for dispensing a cleaning fluid before and/or after the wiper () to substantially eliminate buildup of deposits.