Company Filing History:
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Years Active: 2003-2021
Title: Innovative Mind: The Patents of Jung Hwan Song
Introduction
Jung Hwan Song is a prolific inventor based in Seoul, South Korea, known for his impactful contributions to the field of semiconductor technology. With a total of three patents to his name, he has made significant strides in developing etching compositions that enhance the efficiency and precision of semiconductor processes.
Latest Patents
Among his latest innovations, Jung Hwan Song has developed an etching composition that is highly effective for selectively wet etching silicon nitride films. This composition includes an inorganic acid, a silicon-based compound, and an ammonium-based compound, specifically ammonium acetic acid, all combined with water. Notably, it achieves an etching rate that is at least 200 times faster than that of a corresponding silicon oxide film.
Additionally, he has designed an etchant composition that boasts high selectivity to silicon nitride films. This advanced composition selectively etches silicon nitride at an impressive ratio of 2000:1 compared to silicon oxide films during high-temperature etch processes. This innovation minimizes damage to silicon oxide films while maintaining a high etching rate, ensuring the integrity of the semiconductor structure throughout the etching process.
Career Highlights
Jung Hwan Song has an impressive career path, having worked with notable organizations such as Ltcam Co., Ltd. and the Korea Institute of Science and Technology. His role in these institutions has significantly contributed to advancing semiconductor technologies and materials.
Collaborations
Throughout his career, Jung Hwan Song has collaborated with esteemed colleagues, including Sok Ho Lee and Seong Sik Jeon. These professional relationships have fostered a collaborative environment conducive to innovation and have likely played a role in the success of his patents and developments.
Conclusion
Jung Hwan Song continues to be a leading figure in semiconductor research and development, with his innovative etching compositions paving the way for advancements in the industry. His dedication to improving semiconductor fabrication processes underscores the vital role of inventors in driving technological progress.