Jun Yeob Kim

Title: Jun Yeob Kim: Innovator in Overlay Measurement Technology

Introduction

Jun Yeob Kim is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of overlay measurement technology, holding 2 patents that showcase his innovative approach to optimizing focus in complex measurement systems.

Latest Patents

One of his latest patents focuses on optimizing the focus for wafers that have multi-peak focus. This overlay measurement device includes a light source that directs illumination to an overlay measurement target, where a first overlay key is formed in a first layer and a second overlay key is formed in a second layer stacked on top of the first layer. The device features a lens assembly with an objective lens and a lens focus actuator, a detector for obtaining focus images, and a controller that manages the lens assembly to acquire depth-specific focus images. The controller extracts multiple candidate focuses from these images and selects the optimal focus by applying predetermined parameters.

Another notable patent is a device and method for overlay measurement that controls focus movement. This device also includes a light source directing illumination to an overlay measurement target, with the first and second overlay keys positioned in respective layers. The lens assembly condenses the illumination on a measurement position, while a lens focus actuator controls the distance between the objective lens and the overlay measurement target. A detector acquires focus images based on the beam reflected from the measurement position.

Career Highlights

Jun Yeob Kim has worked with notable companies such as Auros Technology, Inc. and Samsung Electronics Co., Ltd. His experience in these organizations has allowed him to refine his skills and contribute to advancements in measurement technology.

Collaborations

Throughout his career, Jun Yeob Kim has collaborated with talented individuals, including Ji Yun Jung and Sol Lee Hwang. These collaborations have further enriched his work and led to innovative solutions in the field.

Conclusion

Jun Yeob Kim is a distinguished inventor whose work in overlay measurement technology has made a significant impact. His patents reflect a deep understanding of complex measurement systems and a commitment to innovation.