Company Filing History:

6 out of 1,088

Vanguard International Semiconductor Corporation

patents

1 out of 3,768

Lam Research Corporation

patents

Years Active: 1998-2005

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7 patents (USPTO):Sort by Forward CitationsExplore Patents

1. 6861362 - Self-aligned contact process implementing bias compensation etch endpoint detection and methods for implementing the same (2005-03-01),

2. 6211557 - Contact structure using taper contact etching and polycide step (2001-04-03),

3. 6069077 - UV resist curing as an indirect means to increase SiN corner selectivity (2000-05-30),

4. 5915198 - Contact process using taper contact etching and polycide step (1999-06-22),

5. 5854135 - Optimized dry etching procedure, using an oxygen containing ambient, for (1998-12-29),

6. 5817579 - Two step plasma etch method for forming self aligned contact (1998-10-06),

7. 5788767 - Method for forming single sin layer as passivation film (1998-08-04),

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Company Filing History:

Years Active: 1998-2005