Juinn-Jie Chang

Title: Juinn-Jie Chang: Innovator in Semiconductor Technology

Introduction

Juinn-Jie Chang is a notable inventor based in Tainan, Taiwan. He has made significant contributions to the field of semiconductor technology, particularly in the area of ion implantation.

Latest Patents

Juinn-Jie Chang holds a patent for a "Method of monitoring high tilt angle of medium current implant." This innovative method involves monitoring and adjusting the position of a wafer in relation to an ion beam. The process includes setting the wafer holder's position to achieve a tilt angle of 45 degrees and a twist angle of 45 degrees concerning the ion beam path. The method also entails implanting boron species into the wafer at a specific energy level and dose, while periodically measuring the sheet resistivity to ensure optimal performance.

Career Highlights

Chang is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work focuses on enhancing the precision and efficiency of ion implantation processes, which are critical for semiconductor manufacturing.

Collaborations

Throughout his career, Juinn-Jie Chang has collaborated with esteemed colleagues, including Hung-Ta Huang and Hsueh-Li Sun. These partnerships have contributed to advancements in semiconductor technologies and innovations.

Conclusion

Juinn-Jie Chang's contributions to semiconductor technology through his innovative patent and collaborative efforts highlight his role as a key figure in the industry. His work continues to influence the field and drive advancements in semiconductor manufacturing.