Jui-Ping Lin

Title: Jui-Ping Lin: Innovator in Semiconductor Technology

Introduction

Jui-Ping Lin is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of six patents. His work focuses on enhancing the performance and efficiency of transistors, which are crucial components in modern electronic devices.

Latest Patents

Among his latest patents is a groundbreaking method for creating a gate-all-around transistor with reduced source/drain contact resistance. This method involves forming a gate stack, growing a source/drain region through epitaxy, and depositing a contact etch stop layer over the source/drain region. The process continues with the deposition of an inter-layer dielectric, followed by etching to create a contact opening that extends into the source/drain region. A metal layer is then deposited, ensuring uniform thickness across its horizontal, vertical, and corner portions. An annealing process is performed to react the metal layer with the source/drain region, forming a source/drain silicide region and completing the contact structure with a source/drain contact plug.

Another notable patent is related to the source/drain contact structure. This method begins with a workpiece that includes a gate structure and various dielectric features. The process includes replacing a top portion of the dielectric layer with a hard mask layer, etching to form a source/drain contact opening, and ultimately forming a source/drain contact over the exposed feature.

Career Highlights

Jui-Ping Lin is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His innovative work has positioned him as a key player in advancing semiconductor technology.

Collaborations

Throughout his career, Jui-Ping Lin has collaborated with notable colleagues, including Chen-Ming Lee and Fu-Kai Yang. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Jui-Ping Lin's contributions to semiconductor technology through his patents and collaborations highlight his role as an influential inventor in the field. His work continues to impact the development of advanced electronic devices, showcasing the importance of innovation in technology.