Jue-Jye Chen

Title: Jue-Jye Chen: Innovator in Semiconductor Technology

Introduction

Jue-Jye Chen is a prominent inventor based in I Lan, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on improving the efficiency and accuracy of semiconductor manufacturing processes.

Latest Patents

One of Jue-Jye Chen's latest patents is titled "Test site and a method of monitoring via etch depths for semiconductor." This invention provides a test site on a product wafer for measuring via etch depth and a method of monitoring the depth of the vias using the test site. A substrate is provided that includes a test site area and a circuit area. A test site via is formed in the test site area, which is utilized to measure the depth of the insulating layers remaining in the test site via and the depth of the test site via itself. The measurements are taken using an in-line non-destructible measurement tool, such as an ellipsometer or spectrophotometer. The test site is specifically designed to be large enough to allow for accurate measurement of the via depth. The depth of the oxide remaining in the test site via is measured after the via etch and is correlated to the amount of titanium nitride removed from the tops of the metal lines in the circuit areas. The via etch process is then adjusted to ensure that the vias are deep enough without removing too much of the top barrier layer, such as titanium nitride, over the metal lines.

Career Highlights

Jue-Jye Chen is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His expertise and innovative approach have contributed to advancements in semiconductor manufacturing techniques.

Collaborations

Throughout his career, Jue-Jye Chen has collaborated with notable colleagues, including Shu-Lan Ying and Yuan-Chang Huang. These partnerships have fostered a collaborative environment that encourages innovation and the sharing of ideas.

Conclusion

Jue-Jye Chen is a distinguished inventor whose work in semiconductor technology has led to significant advancements in the field. His patents reflect his commitment to improving manufacturing processes and ensuring the efficiency of semiconductor production.