Location History:
- Allentown, PA (US) (1998 - 2001)
- Orlando, FL (US) (2000 - 2004)
- Windermere, FL (US) (2006)
Company Filing History:
Years Active: 1998-2006
Title: Joseph William Buckfeller: Innovator in Gas Flow Calibration and Physical Vapor Deposition
Introduction
Joseph William Buckfeller is a notable inventor based in Orlando, FL (US). He holds a total of 8 patents that reflect his contributions to the fields of gas flow calibration and physical vapor deposition processes. His innovative work has significantly impacted manufacturing processes, particularly in the semiconductor industry.
Latest Patents
One of Buckfeller's latest patents is focused on a bypass loop gas flow calibration system. This invention describes apparatuses, methods, and systems designed to monitor the performance of mass flow controllers that supply gases to various manufacturing processes, including deposition and etching. The system includes a bypass loop connected to either the process line or the vent line, featuring a flow detector that measures gas flow from the mass flow controller. The data collected is utilized to assess the accuracy and precision of the mass flow controller, with additional methods disclosed to correct for back pressure or back vacuum in the process line.
Another significant patent by Buckfeller addresses temperature optimization in physical vapor deposition processes. This invention aims to maintain the wafer temperature below a critical threshold during the deposition of material particles. By controlling the deposition rate in response to the power supplied to the target, the process ensures that the wafer remains at a safe temperature, preventing extrusion into openings.
Career Highlights
Throughout his career, Joseph William Buckfeller has worked with prominent companies such as Lucent Technologies Inc. and Agere Systems Inc. His experience in these organizations has allowed him to develop and refine his innovative ideas, contributing to advancements in technology and manufacturing.
Collaborations
Buckfeller has collaborated with notable professionals in his field, including Sailesh Mansinh Merchant and Sailesh Chittipeddi. These collaborations have further enriched his work and expanded the impact of his inventions.
Conclusion
Joseph William Buckfeller's contributions to gas flow calibration and physical vapor deposition processes demonstrate his innovative spirit and dedication to advancing technology. His patents reflect a commitment to improving manufacturing processes, making him a significant figure in the field of invention.