Joseph R Breivogel

Title: Joseph R Breivogel - Innovator in Semiconductor Polishing Technology

Introduction

Joseph R Breivogel, based in Aloha, Oregon, is a distinguished inventor with a remarkable portfolio of 10 patents. His innovative contributions primarily focus on methods and apparatus for chemical-mechanical polishing (CMP), critical in the semiconductor manufacturing industry. Breivogel's advancements have significantly enhanced the efficiency and effectiveness of polishing thin films on semiconductor substrates.

Latest Patents

Among his latest innovations is the "Orbital Motion Chemical-Mechanical Polishing Method and Apparatus." This invention introduces a sophisticated method for polishing a thin film formed on a semiconductor substrate. The apparatus features a table covered with a polishing pad that orbits around an axis, ensuring a uniform distribution of slurry across the pad surface during the polishing process. The substrate, pressed face down against the orbiting pad's surface, is rotated to optimize the polishing effect, aided by the slurry.

Another significant patent by Breivogel is the "Method and Apparatus for Chemical Mechanical Polishing." This novel approach also focuses on uniformly polishing thin films on semiconductor substrates. It involves placing the substrate face down on a moving polishing pad, with pneumatic or hydraulic pressure applied to the substrate's backside to enhance polishing effectiveness. Additionally, a wear ring is utilized to maintain coplanarity with the substrate, minimizing edge rounding effects during the process.

Career Highlights

Breivogel's professional journey includes valuable experience at renowned companies such as Intel Corporation and Lam Research Corporation. His tenure at these organizations has fueled his passion for innovation, allowing him to develop cutting-edge technologies that address complex challenges in semiconductor processing.

Collaborations

Throughout his career, Breivogel has collaborated with notable industry professionals, including Christopher E Barns and Matthew J Prince. These partnerships have fostered an environment of creativity and innovation, contributing to the advancement of semiconductor manufacturing processes.

Conclusion

Joseph R Breivogel stands out as a pivotal figure in the realm of semiconductor polishing technology. His extensive patent portfolio showcases his commitment to innovation and excellence. Through his groundbreaking inventions, Breivogel continues to influence the semiconductor industry, paving the way for future advancements and efficiencies in manufacturing processes.