Location History:
- Essex Junciton, VT (US) (2002)
- Essex Junction, VT (US) (1999 - 2003)
Company Filing History:
Years Active: 1999-2003
Title: Innovations by Inventor Jose L Cruz
Introduction
Jose L Cruz is a notable inventor based in Essex Junction, VT (US). He has made significant contributions to the field of semiconductor technology, particularly in the area of chemical mechanical polishing (CMP) processes. With a total of 4 patents to his name, Cruz has developed innovative methods that enhance the efficiency and effectiveness of semiconductor manufacturing.
Latest Patents
Cruz's latest patents include a method to prevent leaving residual metal in the CMP process of metal interconnects. This invention discloses a CMP slurry and method for polishing a semiconductor wafer during the formation of metal interconnects. The first slurry, which contains ferric nitrate, effectively removes excess metal while leaving metal residues on the wafer surface. A second slurry, containing potassium iodate solution, is then used to remove these residues with minimal scratching of the underlying dielectric. This innovative approach results in more robust metal interconnects, lowering overall resistance, reducing shorts, and providing better protection for the dielectric layer. Another significant patent is a method and apparatus for multiphase chemical mechanical polishing, which introduces an aqueous solution during various intervals of the polishing procedure to reduce scratching of the insulating film and conductor lines.
Career Highlights
Cruz is currently employed at International Business Machines Corporation (IBM), where he continues to push the boundaries of semiconductor technology. His work has been instrumental in improving the reliability and performance of semiconductor devices.
Collaborations
Cruz has collaborated with several talented individuals in his field, including Douglas Keith Sturtevant and Cuc Kim Huynh. These collaborations have contributed to the advancement of innovative solutions in semiconductor manufacturing.
Conclusion
Jose L Cruz is a prominent inventor whose work in semiconductor technology has led to significant advancements in the CMP process. His innovative patents reflect his commitment to improving manufacturing techniques and enhancing the performance of semiconductor devices.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.