Jonathan Church

Title: Innovations by Jonathan Church in Semiconductor Technology

Introduction

Jonathan Church is an accomplished inventor based in Portland, OR (US). He has made significant contributions to the field of semiconductor technology, holding a total of 3 patents. His work focuses on developing advanced materials and methods that enhance the performance and reliability of semiconductor devices.

Latest Patents

One of Jonathan's latest patents is titled "Low stress films for advanced semiconductor applications." This invention involves processing a semiconductor substrate by depositing a doped silicon oxide film on a patterned semiconductor substrate. The film has a thickness of at least 5 μm and is annealed to a temperature above the film's glass transition temperature. The innovative aspect of this patent is that the film exhibits substantially zero as-deposited stress, zero stress shift post-anneal, and zero shrinkage post-anneal, making it particularly useful for large area gap fill applications in advanced 3D NAND devices.

Another notable patent is the "Method for depositing high deposition rate, thick tetraethyl orthosilicate film with low compressive stress, high film stability and low shrinkage." This method aims to reduce post-annealing shrinkage of silicon dioxide film by carefully controlling the processing conditions. The process involves arranging a substrate in a processing chamber, setting specific pressure and temperature ranges, and supplying a process gas mixture that includes TEOS gas and argon gas. The result is a film that maintains its integrity and stability during the manufacturing process.

Career Highlights

Jonathan Church is currently employed at Lam Research Corporation, a leading company in semiconductor manufacturing equipment. His role involves researching and developing innovative solutions that address the challenges faced in the semiconductor industry. His expertise and contributions have positioned him as a key player in advancing semiconductor technology.

Collaborations

Jonathan has collaborated with notable colleagues, including Keith Fox and Reza Bayati. Their combined efforts have led to significant advancements in the field, showcasing the importance of teamwork in driving innovation.

Conclusion

Jonathan Church's work in semiconductor technology exemplifies the impact of innovation on modern electronics. His patents reflect a commitment to enhancing the performance and reliability of semiconductor devices, making him a valuable contributor to the industry.