Jon Hamilton

Title: Jon Hamilton: Innovator in Substrate Support Technologies

Introduction

Jon Hamilton is a notable inventor based in Alameda, CA (US). He has made significant contributions to the field of substrate support technologies, holding a total of 3 patents. His work focuses on enhancing the precision and functionality of substrate support apparatuses.

Latest Patents

Hamilton's latest patents include a Z-stage with a dynamically driven stage mirror and a chuck assembly. This innovative substrate support apparatus allows for the dynamic compensation of motion between a substrate chuck and a stage mirror. By sensing the displacement of the substrate chuck relative to the stage mirror, the system utilizes feedback loops with Z stage actuators and/or XY stage actuators to maintain accuracy. The design incorporates a Z stage plate, a stage mirror, and actuators that impart movement in a Z direction while scanning in a plane perpendicular to that direction. The actuators may feature force flexures, enhancing the overall performance of the apparatus.

Career Highlights

Throughout his career, Jon Hamilton has worked with prominent companies such as KLA-Tencor Technologies Corporation and KLA-Tencor Corporation. His experience in these organizations has allowed him to refine his skills and contribute to cutting-edge technologies in the field.

Collaborations

Some of his notable coworkers include Salam Harb and Kent Douglas. Their collaboration has likely fostered an environment of innovation and creativity, further enhancing the development of advanced substrate support systems.

Conclusion

Jon Hamilton's contributions to substrate support technologies exemplify his dedication to innovation and excellence. His patents reflect a deep understanding of the complexities involved in substrate motion and support, making him a valuable figure in the field.