Average Co-Inventor Count = 5.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Kla-Tencor Technologies Corporation (2 from 641 patents)
2. Kla Tencor Corporation (1 from 1,787 patents)
3 patents:
1. 9141002 - Z-stage with dynamically driven stage mirror and chuck assembly having constraint
2. 8390789 - Z-stage with dynamically driven stage mirror and chuck assembly
3. 7800735 - Z-stage with dynamically driven stage mirror and chuck assembly