John M Warlaumont

Title: Innovations of John M Warlaumont

Introduction

John M Warlaumont is a notable inventor based in Ridgewood, NJ (US). He has made significant contributions to the field of technology, particularly in the area of lithography. With a total of 4 patents to his name, Warlaumont's work has had a considerable impact on the industry.

Latest Patents

One of his latest patents is the "Variable magnification mask for X-ray lithography." This invention features an X-ray mask structure that can be adjusted by applied force to provide variable magnification of a pattern on the mask membrane. The applied force is generated by the heat expansion of a deformable member, which creates stress on a support ring. The mask membrane is supported by a ring made of materials such as silicon or silicon-pyrex. The support ring includes a concentric aluminum ring with an embedded circular heating element. This heating element causes the aluminum ring to expand, resulting in mechanical stress that expands the mask membrane, thereby magnifying the pattern.

Another significant patent is the "Electrostatic or vacuum pinchuck formed with microcircuit lithography." This invention utilizes lithographic techniques to define and etch a pattern of pins from an extremely flat etchable surface. The flat surface eliminates the need for leveling or polishing the pins after formation. The pin head dimensions, number of pins, arrangement, and density can be freely chosen without affecting fabrication costs. The etched pins are surrounded by an unetched band, forming a raised peripheral ring that acts as a vacuum sealing ring when used as a vacuum pinchuck. Additionally, by fabricating the pins from electrically conductive material and covering them with a dielectric film, the pinchuck can function as either an electrostatic or vacuum pinchuck, or both simultaneously.

Career Highlights

John M Warlaumont is currently employed at International Business Machines Corporation (IBM). His work at IBM has allowed him to further develop his innovative ideas and contribute to cutting-edge technology.

Collaborations

Some of his notable coworkers include Vincent Di Milia and Juan R Maldonado. Their collaboration has likely fostered an environment of creativity and innovation within their projects.

Conclusion

John M Warlaumont's contributions to the field of lithography and his innovative patents demonstrate his significant role as an inventor. His work continues to