Johannes Van Wingerden

Title: Profile of Inventor Johannes Van Wingerden

Introduction: Johannes Van Wingerden is a notable inventor based in Leuven, Belgium, recognized for his significant contributions to the field of lithography. With a remarkable portfolio of six patents, he focuses on innovative methods that enhance the accuracy and efficiency of lithographic processes.

Latest Patents: One of Johannes’ latest patents is for a removable pellicle designed for immersion lithography. This innovative method involves applying a removable transparent layer over a photosensitive layer immersed in a fluid. By projecting radiation through the immersion fluid and the transparent layer, imperfections present in the fluid can be kept out of focus, minimizing shadowing and enhancing the overall irradiation quality. This technique is particularly effective in reducing defects caused by small bubbles or particles at the fluid/surface interface.

Another significant patent by Johannes is a lithographic method of manufacturing a device that achieves high density. This method involves distributing a design mask pattern across several sub-patterns, avoiding the use of 'forbidden' structures. Utilizing a new stack of layers, which consists of processing and inorganic anti-reflection layers for each sub-pattern, enables successful transfer to the substrate layer. After patterning with the first sub-pattern, a new resist layer is coated and exposed with a second sub-pattern, optimizing the lithographic process.

Career Highlights: Johannes Van Wingerden’s career is marked by his association with Koninklijke Philips Corporation N.V., where he has made substantial advancements in lithographic technologies. His innovative approaches continue to push the boundaries of what is possible in device manufacturing.

Collaborations: Throughout his career, Johannes has collaborated with esteemed colleagues such as Peter Dirksen and Casparus Anthonius Henricus Juffermans. These collaborations have likely contributed to the innovative ideas and patent developments that mark his work in the field.

Conclusion: Johannes Van Wingerden represents the essence of innovation in the realms of lithography and device manufacturing. His patents reflect a deep understanding of the technical challenges in the industry and showcase his commitment to advancing technology through meticulous research and groundbreaking methods. As he continues to push the limits of lithographic processes, his contributions will undoubtedly leave a lasting impact on the field.