Johanes H Sukamto

Title: The Innovative Contributions of Johanes H Sukamto

Introduction

Johanes H Sukamto is a notable inventor based in Lake Oswego, Oregon. He has made significant contributions to the field of technology, particularly in the area of semiconductor processing. With a total of 3 patents to his name, Sukamto's work has had a considerable impact on the industry.

Latest Patents

One of Sukamto's latest patents involves sonic irradiation during wafer immersion. This innovative technique applies sonic radiation to a portion of a rotating, tilted wafer as it is immersed into a liquid treatment bath. The method effectively minimizes power density, which helps in removing bubbles from the wafer surface and avoids cavitation in the liquid bath. In some cases, the liquid bath is de-gassed to further inhibit bubble formation.

Another significant patent focuses on the annealing of a ruthenium seed layer to improve copper plating. In this process, a ruthenium-containing thin film is formed and subsequently annealed in an oxygen-free atmosphere at controlled temperatures. This technique enhances the deposition of copper or other metals onto the treated thin film, which is crucial for semiconductor manufacturing.

Career Highlights

Johanes H Sukamto is currently employed at Novellus Systems Incorporated, a company known for its advanced semiconductor manufacturing technologies. His work at Novellus has allowed him to develop and refine innovative processes that contribute to the efficiency and effectiveness of semiconductor fabrication.

Collaborations

Sukamto has collaborated with several talented individuals in his field, including Jonathan David Reid and Eric G Webb. These collaborations have fostered an environment of innovation and have led to the development of cutting-edge technologies in semiconductor processing.

Conclusion

Johanes H Sukamto's contributions to the field of semiconductor technology are noteworthy. His innovative patents and work at Novellus Systems Incorporated demonstrate his commitment to advancing the industry. Through his collaborations and research, Sukamto continues to influence the future of semiconductor manufacturing.