Company Filing History:
Years Active: 2018-2020
Title: Innovations by Joe Ferrara in Semiconductor Manufacturing
Introduction
Joe Ferrara is a notable inventor based in Georgetown, MA, who has made significant contributions to the field of semiconductor manufacturing. With a total of two patents to his name, Ferrara's work focuses on enhancing the efficiency and accuracy of workpiece alignment and temperature control during ion implantation processes.
Latest Patents
Ferrara's latest patents include a "Shallow angle, multi-wavelength, multi-receiver, adjustable sensitivity aligner sensor for semiconductor manufacturing equipment." This invention provides a workpiece alignment system that utilizes a light emission apparatus to direct a light beam at various wavelengths along a shallow angle toward a workpiece. The system includes a light receiver apparatus that detects the light beam on the opposite side of the workpiece, allowing for precise positioning based on the amount of light received. Additionally, Ferrara has developed a patent for "Wafer temperature control with consideration to beam power input." This system maintains the temperature of a workpiece during ion implantation by using a heated chuck to control the temperature accurately, ensuring optimal conditions for the implantation process.
Career Highlights
Joe Ferrara is currently employed at Axcelis Technologies, Inc., where he continues to innovate in the semiconductor manufacturing sector. His work has been instrumental in advancing technologies that improve the performance and reliability of semiconductor devices.
Collaborations
Ferrara collaborates with talented professionals in his field, including coworkers John F. Baggett and Brian Terry. Their combined expertise contributes to the development of cutting-edge technologies in semiconductor manufacturing.
Conclusion
Joe Ferrara's contributions to semiconductor manufacturing through his innovative patents demonstrate his commitment to advancing technology in this critical field. His work not only enhances manufacturing processes but also sets a foundation for future innovations.