This inventor holds 5 USPTO granted patents. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2015-2025.
Company Filing History:
Years Active: 2015-2025
Title: Innovations of Jiseung Lee in Semiconductor Technology
Introduction
Jiseung Lee is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of five patents. His work focuses on advanced methods for cutting fine patterns and manufacturing semiconductor devices.
Latest Patents
Among his latest patents are innovative methods of cutting a fine pattern, methods of forming active patterns using the same, and methods of manufacturing a semiconductor device utilizing these techniques. In his method of cutting a fine pattern, a line structure is formed on a substrate, extending in a first direction. This line structure includes a pattern and a first mask, which are made from different materials. A sacrificial layer is then formed on the substrate to cover the line structure. The sacrificial layer is partially etched to create a first opening that partially overlaps the line structure in a vertical direction. A portion of the first mask, an upper portion of the pattern, and/or a portion of the sacrificial layer under the first opening are partially etched using an etching gas that has no etching selectivity among the pattern, the first mask, and the sacrificial layer. Finally, a lower portion of the pattern beneath the upper portion is removed, dividing the pattern into multiple pieces that are spaced apart from each other in the first direction.
Career Highlights
Jiseung Lee is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate and develop new technologies in the semiconductor industry. His expertise and contributions have positioned him as a key figure in his field.
Collaborations
He has collaborated with notable coworkers, including Sanggyo Chung and Hyunchul Lee, who share his commitment to advancing semiconductor technology.
Conclusion
Jiseung Lee's innovative work in semiconductor technology, particularly in cutting fine patterns and manufacturing devices, showcases his significant impact on the industry. His contributions continue to shape the future of semiconductor manufacturing.