Company Filing History:
Years Active: 2019-2025
Title: Jinwon Ma: Innovator in Semiconductor Technology
Introduction
Jinwon Ma is a prominent inventor based in Hwaseong-si, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 5 patents. His work focuses on innovative methods for manufacturing semiconductor devices, which are crucial for modern electronics.
Latest Patents
One of Jinwon Ma's latest patents is a method for manufacturing a semiconductor device that includes an air gap. This method involves loading a semiconductor substrate into a chamber, where the substrate features a silicon oxide film. The process includes depositing a seed layer on the silicon oxide film by supplying a first silicon source material, followed by the application of a purge gas on the seed layer. Additionally, a protective layer is deposited on the seed layer through a repeated first cycle, which consists of supplying a base source material layer and subsequently the first silicon source material. Finally, a silicon nitride film is deposited on the protective layer by repeating a second cycle, which includes supplying a second silicon source material and a nitrogen source material.
Another notable patent is for an integrated circuit device. This device features word lines extending in a first direction across a substrate and spaced apart in a second direction. Bit lines extend on the word lines in the second direction and are spaced apart in the first direction. The device includes a first contact plug arranged among the bitlines, which contacts a first active region of the substrate, and a second contact plug that contacts a second active region of the substrate, with varying widths and dopant concentrations.
Career Highlights
Jinwon Ma is currently employed at Samsung Electronics Co., Ltd., a leading company in the electronics industry. His work at Samsung has allowed him to be at the forefront of semiconductor innovation, contributing to the development of advanced technologies that power various electronic devices.
Collaborations
Throughout his career, Jinwon Ma has collaborated with notable colleagues, including Jun-Noh Lee and Dong-Hyun Im. These collaborations have fostered a creative environment that encourages the exchange of ideas and advancements in semiconductor technology.
Conclusion
Jinwon Ma is a key figure in the semiconductor industry, with a strong portfolio of patents that reflect his innovative spirit. His contributions to semiconductor manufacturing methods and integrated circuit devices continue to influence the field significantly.