The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Aug. 18, 2020

Filed:

Dec. 12, 2019
Applicant:

Samsung Electronics Co., Ltd., Suwon-si, KR;

Inventors:

Jinwon Ma, Hwaseong-si, KR;

Jun-Noh Lee, Hwaseong-si, KR;

Dong-Hyun Im, Suwon-si, KR;

Youngseok Kim, Seoul, KR;

Kongsoo Lee, Hwaseong-si, KR;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 27/108 (2006.01); H01L 21/768 (2006.01); H01L 23/485 (2006.01); H01L 23/532 (2006.01);
U.S. Cl.
CPC ...
H01L 27/10888 (2013.01); H01L 21/76805 (2013.01); H01L 21/76883 (2013.01); H01L 21/76895 (2013.01); H01L 21/76897 (2013.01); H01L 23/485 (2013.01); H01L 27/10811 (2013.01); H01L 27/10855 (2013.01); H01L 27/10885 (2013.01); H01L 23/53271 (2013.01);
Abstract

A method of fabricating a semiconductor device includes forming an interlayer insulating structure on a substrate, forming a contact hole that penetrates the interlayer insulating structure to expose the substrate, forming an amorphous silicon layer including a first portion and a second portion, the first portion covering a top surface of the substrate exposed by the contact hole, the second portion covering a sidewall of the contact hole, providing hydrogen atoms into the amorphous silicon layer, and crystallizing the first portion using the substrate as a seed.


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