This inventor holds 1 USPTO granted patent. Top assignee: Ulvac, Inc.. Active years: 2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2026
Title: Jinhyeok Son: Inventor in Semiconductor Etching
Introduction
Jinhyeok Son is an inventor based in Pyeongtaek, South Korea. His patent work includes a method for generating and supplying reactive precursors to etch a processing subject.
Latest Patents
Son is associated with 1 patent, titled “Etching Method.” The invention generates reactive plasma containing hydrogen and nitrogen in a discharge tube with an inorganic-oxide inner surface, then supplies that plasma to a connected processing chamber. In the chamber, the plasma and a fluorine-containing gas are used to generate a precursor containing fluorine and hydrogen, which is supplied to the etching subject. The method also treats the discharge tube’s inner surface with hydrogen plasma followed by oxygen plasma.
Career Highlights
Son is associated with ULVAC, Inc., a company working in vacuum technology and related equipment. His patent describes a process involving plasma generation, precursor formation, and surface treatment for etching applications.
Collaborations
Youhei Ono is identified as Son’s coworker. The available information does not specify their particular projects or joint contributions.
Conclusion
Jinhyeok Son’s documented invention focuses on plasma-assisted etching and treatment of the discharge tube’s inner surface, reflecting his patent activity in this technical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile