Jin Ho Ahn

Title: **Innovator Jin Ho Ahn: Pioneering Pellicle Technologies**

Introduction

Jin Ho Ahn, an esteemed inventor based in Seoul, South Korea, is known for his significant contributions to pellicle technologies. With a total of three patents to his name, Ahn's innovations have made notable impacts in the field of extreme ultraviolet (EUV) lithography, enhancing the efficiency and effectiveness of semiconductor manufacturing processes.

Latest Patents

Among his latest patents, Ahn has developed a **pellicle holder**, a critical component that includes an outer frame with a pellicle seating space and multiple holding legs. These legs extend toward the pellicle seating area, allowing for adjustments and support of the pellicle effectively. Additionally, his patent on a **pellicle inspection apparatus** and the corresponding **pellicle inspection method** demonstrates advanced techniques for ensuring the integrity and performance of pellicles used in lithography. Furthermore, Ahn's work culminates in a sophisticated **EUV pellicle structure** alongside a method for manufacturing it. This invention prepares pellicle membranes with an intricate intermediate layer that alternates EUV transmission and heat dissipation layers to optimize thermal management during fabrication.

Career Highlights

Throughout his career, Jin Ho Ahn has been associated with key institutions such as the Industry-University Cooperation Foundation at Hanyang University and the Foundation Hanyang University. His endeavors at these organizations have significantly propelled research and development within the semiconductor sector, reflecting his commitment to practical and cutting-edge technological solutions.

Collaborations

Ahn has collaborated with notable colleagues such as Dong Gon Woo and Young Woong Kim. Their joint efforts showcase a team-oriented approach that fosters innovation and the continuous advancement of pellicle technology.

Conclusion

Jin Ho Ahn stands out as a prominent figure in the realm of invention, with a clear focus on refining pellicle technology for the semiconductor industry. His patents exemplify his innovative spirit and dedication to enhancing production efficiency, which will undoubtedly influence future developments in this essential field.