Industry-university Cooperation Foundation Hanyang University

Iowa State University Research Foundation, Inc.

Jin Ho Ahn

Dong Gon Woo

Tae Ho Lee

Jung Hwan Kim

Kai-Ming Ho

Jung Sik Kim

Kristen P Constant

Jae-Hwang Lee

Rana Biswas

Young Woong Kim

In Sung Park

Yong Ju Jang

Provided is a pellicle holder. The pellicle holder includes: an outer frame formed therein with a pellicle seating space; and a plurality of holding legs extending in a direction from the outer frame toward a center of the pellicle seating space, wherein the holding leg is extended or contracted in the extension direction and has one end on which a portion of a pellicle is mounted to support the pellicle.

Pellicle holder, pellicle inspection apparatus, and pellicle inspection method

A method for manufacturing an extreme ultraviolet (EUV) pellicle structure may include preparing a pellicle membrane that includes an intermediate layer structure in which EUV transmission layers and heat dissipation layers are alternately stacked, a first thin layer disposed on a top surface of the intermediate layer structure, and a second thin layer disposed on a bottom surface of the intermediate layer structure and having a heat emissivity lower than that of the first thin layer, and disposing a cooling structure for absorbing heat from the pellicle membrane on an edge sidewall of the pellicle membrane at which the heat dissipation layers are exposed.

EUV pellicle structure and method for manufacturing same

A manufacturing method of a photonic crystal is provided. In the method, a high-refractive-index material is conformally deposited on an exposed portion of a periodic template composed of a low-refractive-index material by an atomic layer deposition process so that a difference in refractive indices or dielectric constants between the template and adjacent air becomes greater, which makes it possible to form a three-dimensional photonic crystal having a superior photonic bandgap. Herein, the three-dimensional structure may be prepared by a layer-by-layer method.

Manufacturing method of photonic crystal

Growing community of inventors

Seoul, South Korea

Jin Ho Ahn