Jie-Fei Zheng

Title: The Innovative Mind of Jie-Fei Zheng

Introduction

Jie-Fei Zheng, an inventive spirit based in Fremont, CA, has made noteworthy contributions to the field of optical engineering and measurement systems. With a total of three patents to his name, Zheng’s work focuses on technologies that advance the precision of measurements, particularly in the semiconductor industry.

Latest Patents

Among his latest inventions is the "Dual wavelength dual interferometer with combiner-splitter." This advanced system features a dual interferometer sub-system that includes a first and second channel, using illumination sources from two distinct laser sources. The system integrates a combiner-splitter element that expertly combines light from both laser sources and effectively splits it between the two channels to enhance measurement capabilities.

Another significant patent is the "Method for reducing wafer shape and thickness measurement errors resulted from cavity shape changes." This innovative method aims to mitigate measurement inaccuracies through a cavity calibration process executed prior to wafer assessments. By leveraging a polynomial fitting process, it creatively accounts for temperature variations and other influences that can distort the cavity's shape, significantly enhancing the accuracy of wafer measurements.

Career Highlights

Jie-Fei Zheng is associated with KLA Tencor Corporation, a leading provider of process control and yield management solutions for the semiconductor industry. His work at the company showcases his dedication to advancing measurement technologies and his role in enhancing product functionality through innovative design and engineering.

Collaborations

Throughout his career, Zheng has collaborated closely with colleagues such as Yi Zhang and Shouhong Tang. These partnerships have been instrumental in furthering research and development projects, enabling the production of groundbreaking technologies that address complex engineering challenges in the industry.

Conclusion

With his trio of patents and ongoing work at KLA Tencor Corporation, Jie-Fei Zheng exemplifies the spirit of innovation in the field of optical engineering. His contributions not only add value to the organization but also propel advancements in measurement technologies essential for the semiconductor sector.