Seoul, South Korea

Jibeom Yoo


Average Co-Inventor Count = 4.6

ph-index = 1

Forward Citations = 4(Granted Patents)


Location History:

  • Seongnam-si, KR (2014)
  • Seoul, KR (2021)
  • Hwaseong-si, KR (2023)

Company Filing History:


Years Active: 2014-2023

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3 patents (USPTO):Explore Patents

Title: Jibeom Yoo: Innovator in Extreme Ultraviolet Technology

Introduction

Jibeom Yoo is a prominent inventor based in Seoul, South Korea. He has made significant contributions to the field of extreme ultraviolet (EUV) technology, holding a total of 3 patents. His work focuses on the development of advanced apparatuses and methods that enhance the generation and application of EUV light.

Latest Patents

Jibeom Yoo's latest patents include an apparatus for generating extreme ultraviolet (EUV) light, a method of manufacturing the same, and an EUV system. The apparatus features a raw material supply unit that provides a plasma source for generating EUV light. The EUV light source unit utilizes a laser to create plasma from this source. Additionally, a filter is designed to extract EUV light from the generated light. A first protective layer is placed on the front surface of the filter, while a frame is positioned over the first protective layer, exposing a portion of it. The width of this exposed region is smaller than that of the protective layer and the filter itself. Furthermore, his methods of manufacturing pellicle and photomask assemblies involve forming a sublimable support layer on a pellicle membrane and attaching a pellicle frame, ensuring precise alignment and functionality.

Career Highlights

Throughout his career, Jibeom Yoo has worked with esteemed organizations such as Sungkyunkwan University and Samsung Electronics. His experience in these institutions has allowed him to refine his expertise in EUV technology and contribute to groundbreaking advancements in the field.

Collaborations

Jibeom Yoo has collaborated with notable colleagues, including Mun Ja Kim and Shashikant P Patole. These partnerships have fostered innovation and have been instrumental in the development of his patented technologies.

Conclusion

Jibeom Yoo's contributions to extreme ultraviolet technology exemplify his dedication to innovation and advancement in the field. His patents and collaborations reflect a commitment to pushing the boundaries of what is possible in EUV applications.

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