Sungkyunkwan University

Samsung Electronics Co., Ltd.

Jibeom Yoo

Mun Ja Kim

Byungchul Yoo

Seulgi Kim

Jihoon Na

Jaewhan Sung

Hyunjune Cho

Shashikant P Patole

Hakseok Lee

Kibong Nam

Jinho Yeo

Hyunmyoung Lee

Myeongjin Jeong

An apparatus for generating extreme ultraviolet (EUV) light includes a raw material supply unit supplying a plasma source for generating EUV light. An EUV light source unit uses a laser to generate plasma from the plasma source. A filter is configured to extract EUV light from the light. A first protective layer is disposed on a front surface of the filter. A frame having a first region exposing at least a portion of the filter or the first protective layer is disposed on the first protective layer. A width of the first region is smaller than a width of the first protective layer and smaller than or equal to a width of the filter.

Apparatus for generating extreme ultraviolet (EUV), method of manufacturing the same, and EUV system

Methods of manufacturing a pellicle assembly may include forming a sublimable support layer on a first surface of a pellicle membrane, attaching a pellicle frame to a second surface of the pellicle membrane while the sublimable support layer is on the first surface of the pellicle membrane, and sublimating the sublimable support layer while the pellicle frame is attached to the pellicle membrane. In order to manufacture a photomask assembly, a photomask is fixed to the pellicle frame such that the photomask faces the pellicle membrane with the pellicle frame therebetween.

Methods of manufacturing pellicle assembly and photomask assembly

There is provided a method for fabricating a three dimensional graphene structure using a catalyst template, in which the three dimensional graphene structure in various forms can be obtained through a simple process by using a metal catalyst in various forms as a template and growing graphene thereon. There is also provided a method for controlling length of a three dimensional graphene structure to be from a few nanometers to a few millimeters by controlling length of the metal catalyst template.

Method for fabricating three dimensional graphene structures using catalyst templates

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Seoul, South Korea

Jibeom Yoo