Company Filing History:
Years Active: 2014-2015
Title: The Innovative Contributions of Jiayao Zhang
Introduction
Jiayao Zhang is a prominent inventor based in Sunnyvale, CA, known for her significant contributions to the field of optical inspection systems. With a total of 2 patents, she has made remarkable advancements that enhance the accuracy and efficiency of inspection technologies.
Latest Patents
One of her latest patents is titled "Bright-field differential interference contrast system with scanning beams of round and elliptical cross-sections." This invention describes a method for providing high accuracy inspection or metrology in a bright-field differential interference contrast (BF-DIC) system. The method involves creating first and second beams from a first light beam, which have round cross-sections and form partially overlapping scanning spots on a substrate. Additionally, third and fourth beams with elliptical cross-sections are created to form second partially overlapping scanning spots. This innovative approach allows for the determination of radial and tangential slopes, which can be used to assess wafer shape or localized topography features.
Another notable patent is "Large particle detection for multi-spot surface scanning inspection systems." This invention adjusts the illumination power density of a multi-spot inspection system in response to detecting a large particle in the inspection path. By utilizing secondary illumination spots, the system can safely collect and image light scattered from the secondary spots without damaging the wafer. This method enhances the reliability of inspection systems by ensuring that large particles do not compromise the integrity of the inspection process.
Career Highlights
Jiayao Zhang is currently employed at Kla Tencor Corporation, where she continues to innovate and develop cutting-edge technologies in optical inspection. Her work has significantly impacted the field, making her a valuable asset to her company and the industry as a whole.
Collaborations
Throughout her career, Jiayao has collaborated with esteemed colleagues such as Juergen Reich and Charles Amsden. These collaborations have fostered an environment of innovation and have contributed to the success of her projects.
Conclusion
Jiayao Zhang's contributions to the field of optical inspection systems exemplify her dedication to innovation and excellence. Her patents reflect her ability to solve complex problems and enhance inspection technologies, making her a noteworthy figure in the industry.