Hsinchu, Taiwan

Jhan-Hong Yeh


Average Co-Inventor Count = 7.2

ph-index = 1

Forward Citations = 6(Granted Patents)


Company Filing History:


Years Active: 2022-2025

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7 patents (USPTO):

Title: Jhan-Hong Yeh: Innovator in Semiconductor Technology

Introduction

Jhan-Hong Yeh is a prominent inventor based in Hsinchu, Taiwan. He has made significant contributions to the field of semiconductor technology, holding a total of 7 patents. His work focuses on enhancing the quality and efficiency of semiconductor manufacturing processes.

Latest Patents

One of his latest patents is titled "Reticle carrier and associated methods." This invention is designed to quickly discharge the residual charge on a reticle, thereby minimizing the attraction of particles to the reticle. The reticle carrier is configured to reduce capacitance between its inner baseplate and the reticle, which in turn decreases the resistance-capacitance (RC) time constant. This innovation increases the discharge speed of the residual charge, ultimately improving the quality and yield of semiconductor devices and reducing defects.

Another notable patent is "Shock wave visualization for extreme ultraviolet plasma optimization." This method involves monitoring a shock wave in an extreme ultraviolet light source by irradiating a target droplet with ionizing radiation. The generated plasma creates a shock wave that can be detected and used to adjust operating parameters of the extreme ultraviolet light source, enhancing the efficiency of extreme ultraviolet lithography tools.

Career Highlights

Jhan-Hong Yeh is currently employed at Taiwan Semiconductor Manufacturing Company Ltd., a leading firm in the semiconductor industry. His work has been instrumental in advancing technologies that are critical for modern electronics.

Collaborations

He has collaborated with notable colleagues, including Li-Jui Chen and Han-Lung Chang, contributing to various innovative projects within the company.

Conclusion

Jhan-Hong Yeh's contributions to semiconductor technology through his patents and collaborations highlight his role as a key innovator in the field. His work continues to influence the quality and efficiency of semiconductor manufacturing processes.

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